|
Language of Instruction
|
English
|
|
Level of Course Unit
|
Bachelor's Degree
|
|
Department / Program
|
ELECTRICAL-ELECTRONICS ENGINEERING
|
|
Type of Program
|
Formal Education
|
|
Type of Course Unit
|
Elective
|
|
Course Delivery Method
|
Face To Face
|
|
Objectives of the Course
|
This course introduces the fundamentals of microfabrication process and reviews the developments, materials and cleanroom protocols.
|
|
Course Content
|
The topics are photolithography, masking and patterning of materials, oxidation and diffusion, ion implantation, thermal processing, etching, metal and dielectric deposition for contacts, gate and interconnect engineering, metrology and process control systems, packaging, MEMS devices.
|
|
Course Methods and Techniques
|
|
|
Prerequisites and co-requisities
|
None
|
|
Course Coordinator
|
Asist Prof.Dr. DOOYOUNG HAH dooyoung.hah@agu.edu.tr
|
|
Name of Lecturers
|
None
|
|
Assistants
|
None
|
|
Work Placement(s)
|
No
|
Recommended or Required Reading
|